A five-member team led by Motoyuki Shima has received the 64th CSJ Award for Technical Development from the Chemical Society of Japan. Shima is General Manager of the Semiconductor Materials Laboratory, one of the Fine Electronic Materials Research Laboratories at JSR Corp. (TYO:4185). The award recognizes the team’s development of a topcoat material for use in argon fluoride (ArF) immersion…
Please subscribe to read the full story.Subscribe
Already a member? Log in here
